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Silicon Pressure Sensor
Description of Silicon Pressure Sensor
Based on silicon piezoresistive technology, UPX6-a, -b, and -c are manufactured by adopting high quality piezoresistive silicon chips.
UPX6-a silicon piezoresistive pressure sensor is the ultra-thin design based on UPX19 foundation.
UPX6-b silicon piezoresistive pressure sensor is manufactured by using UPX-19's manufacturing techniques. It is designed for application of high pressure situation. Its small diameter causes the strength on the sensor body reduce greatly after installation.
UPX6-c silicon piezoresistive pressure sensor is manufactured by using UPX-19's manufacturing techniques. Except their outer diameters and lengths, other technical specifications of these sensors are completely same.
Features of Silicon Pressure Sensor
◇Computer tested, high precise compensation
◇Good performance, high reliability
◇Imported pressure silicon dies
◇Isolated-type structure, suitable for many kinds of media measurement
Specifications of Silicon Pressure Sensor
|pressure medium||gas or liquid compatible to stainless steel|
-1...0~0.2...100 bar (UPX6-a G, A, S)
0~10...1000 bar (UPX6-b A, S)
-1...0~0.4...400bar (UPX6-c G A S)
|pressure type||gauge(G), absolute(A), sealed gauge(S)|
|excitation||1.5mA or 10V DC (1.5mA standard)|
|compensated temperature range||-10~+70℃|
|operating temperature range||-40~+100℃|
|storage temperature range||-40~+100℃|
|temperature coefficient of zero||0.2%FS/10℃|
|temperature coefficient of span||0.2%FS/10℃|
|electrical connection||6 pin or 4wires|
|material of pressure membrane and housing||316L|